A multi-layer electro elastic drive for micro and nano robotics
Abstract
A multi-layer electro elastic drive of robotics is used in adaptive optics of compound
telescope, scanning microscopy, interferometry and nanotechnology. For micro and nano
robotics a multi-layer electro elastic drive is applied. The parametric model of a multi-layer
electro elastic drive is determined. Its functions and matrix deformations are founded. The
parameters of the multi-layer longitudinal PZT drive are determined.
Keywords
multi-layer electro elastic drive, multi-layer piezo drive, parametric model, micro and nano robotics
