Abstract

The multilayer longitudinal piezo engine of nano displacement is used in laser systems for nano physics, nano mechatronics, and scanning microscopy, adaptive optics, for nano physics and astronomy research the multilayer engine is applied for compensation deformation, alignment, and autofocus. Image stabilization, precise adjustment of a composite telescope mirror, and correction of wave front by using flexible mirror. In static and dynamic regimes its characteristics are founded. The parameters of the multilayer engine of nano displacement in local control system with various negative feedbacks on the displacement and the acceleration are determined.

Keywords

Multilayer longitudinal piezo engine, Time constant, Nano displacement, Elastic inertial load, Nano physics, Astronomy research